with frequency mixing

link to homepage email to OPT

PECVD technology

top electrode with high uniformity shower head

gas inlet top electrode with 13 MHz Generator and Automatch (AMU)

top electrode with kHz Generator and automatic MHz/ kHz switching

substrate electrode heated and grounded

System control: PLC (programmable logic controller) and PC 2000

Roots pump with dual stage rotary as backing pump

additional turbo optional

gate valve and APC (automatic pressure) control valve

pressure reading: CM gauge for process (Capacitance Manometer)

additional Penning for base pressure optional

gas pod with 6/ 12 MFC controlled gas lines (Mass Flow Controller)

PECVD with Frequency Mixing: Hardware overview/ 6 kB