Plasma Technology

OPT's  PC  System Control Concept

PC Plus: Laser and Optical Emission Control/ 28 kB

All Parameters for running the End point detection software module
in the PC software are displayed here with the help of "Hide" and "View" boxes

main window: all parameters

left window: signal and first derivative

right top window: picture from the camera showing the laser spot
on the substrate

The process can be finished by either time or a variety of criteria using
both laser interferometry and optical emission.


PlasmaPro NGP 80

PC control features

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