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80_HPMa.jpg (12822 Byte)

Plasmalab 80 with High Pressure Microwave Source*


crystalline diamond film/ 7 kB

crystalline diamond film/ 7 kB
Diamond Deposition by HPM PECVD*

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link  DLC PECVD link  DLC by ion beam deposition link   PECVD of Dielectrics
link  Stress controlled SiN PECVD link  Si3N4 Conformal PECVD  

* not offered any longer