Plasma Technology  

 

 

SEM (top) and AFM (bottom )
image of an hBN domain
taken by arresting the
growth reaction before completion.

 

The Raman spectrum shows the
characteristic peak at 1367 cm-1
with a FWHM of 21 cm-1
Growth of 10 mins yields 2-3 layers.

Growth of hexagonal BN

 


 

The Raman spectra of hBN grown on Ni foils
does not exhibit peaks for the cubic phase and
carbon contaminated B-C-N phase or
amorphous BN soot.

 

      

Nanofab
(with high density remote ICP plasma)

 

 

     

Nanofab
(parallel pate version with
with flexible vapour delivery system)

 

 

 

 

 

 

 

 

 

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