Plasma Technology  


 

SEM images of resist after Ti deposition for later lift-off.
Excellent Lift-Off properties with good side wall coverage of ~40%.
Resist shape and profile intact.


 

Optoelectronics feature after sputtered conformally with Titatnium
and after lift-off, well lifted structured, no defects

Metal Sputtering for Lift-Off


magnetron sputtering


Technology:
- Magnetron Sputtering
- Planar configuration

Results:
- Sidewall deposition ideal for lift off
- Defined lift edges
- Good side wall covergae ~40%


Plasmalab System 400
with vacuum loadlock

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