Plasma Technology  

FhG Berlin used their Ionfab 300 for IBE of High
Temperature Superconductors as YBCO.
The system was configured with a filament driven Kaufman source and later retrofitted with an
ECR source (not recommended today).

The photo and graph show the Ionfab 300 Plus
with RF source, which has replaced the
Ionfab 300 with 15 cm Kaufman source
installed in Berlin.

with kind permission of:
  FhG Berlin (now Itzehoe)
  Mr W Pilz


Ionfab 300 Plus

YBCO Ion Beam Etching: 1 µm line


Reactive Ion Beam Etching RIBE


1 µm line etched in YBCO

with kind permission of FhG Berlin:
1 µm YBCO line etched at
low energy with Photoresist mask


1 µm line etched in YBCO

with kind permission of FhG Berlin:
1 µm YBCO line etched at
low energy with Photoresist mask

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