Contact Plasmalab 800 Plus Home
RIE/ PE Plasmalab 800 Plus  

link  Plasmalab 800 Plus main page

 

The Plasmalab 800 Plus can be configured for
failure analysis applications for up to 300 mm wafers.

Our process engineer inspects a 300 mm wafer
after the isotropic SiN removal in PE mode
and an anisotropic SiO2 RIE etch step.

 

related pages:

link  failure analysis etch processes

link  laser interferometry for failure analysis