RIE/ PE switching

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Typical Application:  Failure Analysis

 

  • isotropic PE fotoimide etching
  • anisotropic RIE polyimide etching
  • isotropic PE SiN removal
  • anisotropic SiO2 RIE etching

RIE/ PE layout

RIE / PE schematic/ 7 kB

see also:

Laser Interferometry (for chips)

Optical Emission

RIE/ PE Layout

failure analysis processes

  • substrate electrode cooled
  • top or bottom electrode RF driven (13.56 MHz)
  • automatic switching
  • shower head gas inlet (in the top electrode)
  • parameter: gas flows, pressure, RF power